Gasonics 95-0203-03 power module

Brand:Gasonics
Model: 95-0203-03
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

Gasonics 95-0203-03 power module

Product manual:

Product Name: Gasonics 95-0203-03 Power Module
Functional positioning: The core component that provides stable voltage and current supply for plasma processing systems

1、 Gasonics plasma ashing/cleaning equipment power supply system
This module is widely used in Gasonics' plasma cleaning equipment such as Aura, L3500, and PEP series,
Used to provide the required voltage, current, and signal isolation for the entire machine or a critical subsystem.

Typical functions:

Provide power to the control logic board, sensors, and actuators

Stabilize RF or DC circuit loads in the processing chamber

Provide different voltage outputs (such as ± 15V, 5V, 24V, etc.) for system daughter board use

2、 Power support unit in vacuum processing system
This power module is used to support the normal operation of multiple electric components in the vacuum chamber, such as load lock elevators, vacuum pump interfaces, and valve controls.

Applicable system components:

Wafer Elevator

Load Lock Valve

Process Chamber I/O Interface Control Board

Power input terminal of safety interlock module

3、 The power core of Gasonics control system
The power module is the basic support of the entire control board group, ensuring the voltage stability of the CPU main control board, I/O board, and display/monitoring module.

Related control module power supply objects:

Main control CPU control board

Plasma chamber gas flow control board

Temperature/pressure feedback sensor

System safety alarm device and relay module