Gasonics 95-0320-01 Regulator Component

Brand:Gasonics
Model:95-0320-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 95-0320-01 Regulator Component

Product manual:

1、 Product Overview
Gasonics 95-0320-01 is a regulator assembly used in Gasonics plasma processing equipment,
Its main function is to precisely regulate the gas pressure entering the process chamber or load lock during the operation of the equipment,
Ensure stable operation of the equipment at the set gas flow rate and pressure.
This component typically integrates high-precision pressure regulators, gas interfaces, pressure gauges, and related fixed structures, and is a key component in the entire gas delivery system.

2、 Application Fields
1. Plasma cleaning and stripping equipment
Control the pressure of process gases (such as O ₂, Ar, N ₂, etc.) entering the processing chamber;

Maintain stable plasma reaction to avoid process failure caused by overvoltage or undervoltage.

2. Load lock chamber air pressure control
Inflate the vacuum chamber with back pressure to ensure the safety of the door opening;

Ensure that the chamber pressure meets the set requirements during wafer handling.

3. Vacuum and inert gas delivery system
Applied in the equipment air supply distribution channel to achieve local precision pressure regulation;

Support the linkage of equipment modules such as solenoid valves and flow meters.

3、 Product advantages
✅ High pressure regulation accuracy: suitable for process grade gas control, with sensitive response and strong voltage stabilization;
✅ Compact structure, high integration: modular design, easy installation, small footprint;
Strong compatibility: compatible with multiple Gasonics models of equipment (such as Aura, PEP series);
✅ Industrial grade durability: using corrosion-resistant alloys and sealing materials to adapt to clean rooms and corrosive gas environments;
✅ Support maintenance and replacement: Standard interface design for easy on-site quick disassembly and calibration.