Details
Gasonics 95-1260 C Operating Interface Panel
Product manual:
1、 Product Overview
Gasonics 95-1260 C is an Operator Interface Panel designed specifically for Gasonics plasma processing equipment,
Used for human-computer interaction, the operator controls, monitors, and sets parameters of the device's operating status through this panel,
It is one of the core input/output devices of the equipment control system.
This panel typically includes a display screen (possibly LCD/LED), function buttons, status indicator lights, etc., integrated into the front console of the device.
2、 Technical parameter description (typical features, specific models subject to physical objects)
Display format: Integrated LCD or LED display screen
Key layout: combination of function keys/soft keys/navigation keys
Communication interface: Communicate with the main control PLC or embedded controller through serial or parallel interface
Installation method: panel installation, embedded front cover
Compatible devices: commonly used for equipment models such as Gasonics Aura, PEP, L3510, L3512, etc
3、 Application scenarios
1. Plasma Asher/Descum equipment
Used to set process parameters (such as gas flow rate, power, temperature, time, etc.), monitor chamber status (vacuum, alarm, etc.), support operation start/stop, process selection and other functions.
2. Plasma cleaning/surface treatment equipment
The panel is used to operate the surface treatment system, achieve full control of the process, and improve user interaction efficiency.
3. Load lock control interface
As a direct control interface for the loading and unloading, vacuuming, inflation and other processes of the load lock chamber, it simplifies the operation process and avoids misoperation.
4. Laboratory/Process Development Platform
Provide local visualization and debugging functions in semiconductor experimental platforms used in R&D systems or universities/research institutes.
Product details picture:

95-1260 C
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