Details
Gasonics 95-2736 Power Controller
Product manual:
The Gasonics 95-2736 power controller is a specialized power management module used in Gasonics plasma stripping equipment.
1、 Product Overview
The Gasonics 95-2736 Power Controller is a core power management unit installed on the internal rack of the Gasonics stripping system,
Responsible for logical control, circuit breaker protection, status feedback, and process interlocking of the power supply inside the entire machine.
Its serial number "95-2736" is the standard part number of Gasonics original factory, widely matched with Aura, L3510, PEP and other series models.
2、 Core functions
Function type description
The main power switch controls the power on/off logic of the entire machine, including manual or automatic control modes
Each subsystem's power distribution controls the supply of power to RF modules, vacuum pumps, gas systems, heating units, etc
Overload protection function detects current overload and abnormal voltage, automatically cuts off power and reports an alarm
Real time output of status monitoring and feedback signals such as operation/alarm/circuit breaker for monitoring by the main control board
3、 Application scenarios
The Gasonics 95-2736 power controller is mainly used for:
Power Management Center for Plasma Stripping Equipment
Control the power on sequence and power grouping of the entire machine to ensure that modules start/stop according to specifications
Safety interlock control system in semiconductor technology
Equipment maintenance and fault diagnosis
Support power status display and diagnostic output, making it easy for technicians to troubleshoot problems
Product details picture:

95-2736
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