Gasonics 95-3155 Controller

Brand:Gasonics
Model:95-3155
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 95-3155 Controller

Product manual:

Product Name:
Gasonics 95-3155 Controller Module

Product Overview:
Gasonics 95-3155 is a controller module used in Gasonics plasma processing systems,
Mainly responsible for equipment operation control, status monitoring, and parameter adjustment functions. As the electronic control core of the whole machine,
Coordinating the work of subsystems such as microwave power generation, gas flow, and temperature monitoring is a key component for achieving automated operation of equipment.

Application areas:

Control system for plasma debonding equipment

Used for Gasonics Aura series plasma cleaning equipment, controlling the entire process flow, including microwave energy excitation, gas mixing ratio, vacuum pump working status, etc.

Automation of semiconductor manufacturing process

Support processes such as photoresist stripping and wafer surface treatment, ensuring consistency and repeatability of processing through precise control.

Process parameter setting and execution

By setting and executing preset process recipes through this controller module, it ensures that each wafer is processed under the same conditions.

Equipment fault monitoring and protection

Built in safety logic and alarm function, which can automatically respond to abnormal states or shut down during operation to prevent damage to core components.

Product advantages:

Highly integrated with Gasonics series equipment, easy to install

Support multi parameter adjustment and monitoring to improve process accuracy

Strong stability, suitable for long-term continuous operation in production environments

Helps improve equipment automation level and maintenance efficiency