Gasonics 95-3510-44 Valve Assembly

Brand:Gasonics
Model:95-3510-44
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 95-3510-44 Valve Assembly

Product manual:

Gasonics 95-3510-44 Valve Components - Product Application Field Description

Gasonics 95-3510-44 is a valve assembly designed specifically for plasma cleaning equipment,
Widely used in gas control related modules in the semiconductor manufacturing field.
Its main purpose is to precisely control the on/off, switching, and emission of process gases, ensuring the stability and safety of the atmosphere in the process chamber during plasma treatment.

The main application areas are as follows:
Semiconductor Manufacturing Equipment

Applied to Gasonics AURA and A-2000 series plasma stripping machines.

Control the inflow and outflow of gases such as O ₂, Ar, N ₂ in the cleaning process.

Manage the ventilation and exhaust rhythm of the Loadlock and Process Chamber.

Integrated Circuit (IC) Packaging and Adhesive Removal Process

During the photoresist stripping process after photolithography, control the atmosphere switching and stabilize the chamber pressure.

Display panel manufacturing (such as AMOLED/LCD)

Used in the gas control module of display film layer peeling process equipment.

Manufacturing of Microelectronics/MEMS Devices

Used to ensure high purity and control stability of gas in vacuum chambers during micro - or nano scale etching/stripping.

Vacuum system pneumatic module

Matched in vacuum valve control, chamber blowing or venting systems.