Gasonics 96-1061 A Control Motherboard

Brand:Gasonics
Model: 96-1061 A
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 96-1061 A Control Motherboard

Product manual:

Product Name: Gasonics 96-1061 A Control Motherboard
Component type: Main Controller Board
Main function: As the main control core of Gasonics plasma equipment, responsible for managing the entire system's process flow, subsystem coordination, status monitoring, user interaction, and communication instruction processing.

1、 Central processing core of the system
The 96-1061A control motherboard integrates modules such as processors, memory, and communication controllers, and is responsible for the operation and management of the entire device. It is the "brain" of device operation.

The main tasks include:

Execute process procedures and sequence control

Manage subsystems such as RF system, gas flow, lifting mechanism, etc

Receive user input and drive output display

Communicate data with external devices (such as serial/bus)

2、 Multi module signal coordination
This motherboard maintains communication with multiple subordinate modules (such as decoders, pneumatic modules, power driver boards) and sends control logic or collects feedback information.

Typical connection module:

Control interface board (such as A95-108-02)

Power module (such as MAP130-4000)

Decoding module (such as A90-014-01)

Arm/lift drive control board (such as 885-2423)

3、 Process flow and interlock management
The control motherboard integrates multi-level interlocking logic to ensure that the equipment performs critical operations in a safe state and monitors key parameters such as temperature, pressure, vacuum, and current in real-time.

Typical security features:

High voltage interlock/vacuum interlock judgment

Process time/temperature logic control

System alarm and automatic shutdown