Gasonics 97-0197 Control Motherboard

Brand:Gasonics
Model:97-0197
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 97-0197 Control Motherboard

Product manual:

1、 Product Overview
Gasonics 97-0197 is a control board used for core control in Gasonics plasma equipment (such as Aura and PEP series).
This motherboard serves as the brain of the entire machine, responsible for coordinating and managing the operation and communication of all key subsystems within the device, such as RF power supply, gas control, lifting platform, robot arm, etc.
It integrates multiple I/O interfaces, processor modules, and communication buses (such as CAN, RS-232/422, I ² C, etc.), supporting real-time data processing and hardware linkage control.

2、 Application Fields
1. Plasma stripping and cleaning system (such as Gasonics Aura 3010/PEP 3510 series)
Control the overall process logic, such as vacuum control, RF power control, process timing, etc;

Implement instruction interaction with user HMI interface or upper computer software.

2. Automatic handling and load locking subsystem
Coordinate the movements of modules such as elevators and wafer handling arms;

Realize the precise linkage process of wafer loading and unloading.

3. Process control and gas flow management system
Read sensor data and control components such as mass flow meters, solenoid valves, vacuum valves, etc;

Ensure precise control of various process gases.

3、 Product advantages
✅ Highly integrated: integrating multiple functional modules to simplify the architecture of equipment control systems;

Strong stability: Industrial grade design, suitable for long-term operation in complex environments such as vacuum/high temperature;

✅ Rich communication interfaces: supports multiple fieldbus and standard interfaces, facilitating interconnection with old or new model modules;

Original factory design, 100% compatible: no need to modify device control logic, supports plug and play replacement;

Remote diagnosis: supports remote monitoring, fault diagnosis, and software update functions for some models.