Gasonics A-2000LL 94-2807 Elevator Control Board

Brand:Gasonics
Model:A-2000LL 94-2807
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A-2000LL 94-2807 Elevator Control Board

Product manual:

1、 Product Overview
Gasonics A-2000LL (model 94-2807) is a Lift Control Board specifically designed for load lock chambers in plasma processing equipment. This control board is responsible for driving and managing the movement of the lifting mechanism inside the load lock, achieving vertical lifting, positioning, and safety interlocking of the wafer. It receives instructions from the main controller, coordinates motor drives, limit switches, and position feedback sensors to ensure a smooth and accurate wafer handling process.

2、 Application Fields
1. Load lock system for semiconductor plasma equipment
Control the lifting action of the wafer tray or lifting platform inside the load lock chamber;

Realize linkage with mechanical arms, vacuum doors, and other equipment to complete automated loading and unloading processes.

2. Automated wafer processing equipment
Ensure stable and reliable operation of the lifting mechanism in a high cleanliness environment;

Provide safety protection function to prevent overtravel and misoperation.

3、 Product advantages
✅ High precision motion control: supports delicate lifting adjustment and fast response;

✅ Multiple safety protections: Integrated limit switch interface and fault detection to prevent equipment damage;