Gasonics A06261 Endpoint Detector

Brand:Gasonics
Model: A06261
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A06261 Endpoint Detector

Product manual:

1、 Product Overview
Gasonics A06261 is a specialized endpoint detector used in Gasonics plasma processing equipment,
Used for real-time monitoring of changes in plasma reaction status during the process, accurately determining the "endpoint" of the process (i.e. the time point at which the reaction is completed),
This ensures consistency in processing and process repeatability for each wafer.
Such detectors often use the Optical Emission Spectroscopy (OES) principle, which can sense specific spectral line intensity changes in plasma.

2、 Application Fields
1. Plasma Ashers equipment
Real time monitoring of photoresist removal process, determining whether the treatment is completed by detecting changes in specific gases or residues;

Avoid over peeling or under peeling to improve product yield.

2. Plasma etching equipment
Used to detect etching endpoints, such as changes in interfaces between different materials;

Support precise layer control for multi-layer structures.

3. Semiconductor wafer manufacturing production line
Integrated into wafer cleaning, surface treatment and other process stages to ensure stable process windows;

Improve the consistency and automation level of mass production.