Gasonics A89-004-01 Optical Sensor

Brand:Gasonics
Model: A89-004-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A89-004-01 Optical Sensor

Product manual:

Product Name: Gasonics A89-004-01 Optical Sensor
Component type: Non contact photoelectric sensor
Main function: Used for automated control tasks such as position detection, motion feedback, and status confirmation in Gasonics plasma processing equipment

1、 Load lock system position detection
This sensor is commonly used for load lock or lifting mechanism position confirmation, to determine whether the wafer tray and lifting platform are in place or have completed the action.

Typical monitoring objects:

Lift plate top/bottom position (such as A90-029-03)

Load lock door open/close status

Wafer in/out of position detection

2、 Chamber door and process compartment safety interlock
A89-004-01 can be used as a safety interlock sensor to ensure that the cabin door or cavity components are in the correct position before starting the plasma process, thereby improving the safety of equipment operation.

Common interlocking points:

Confirmation of process chamber door closure

Reset detection of clamping mechanism inside the cavity

Prevent mishandling or triggering of incorrect actions

3、 Step motion control feedback
In a platform or tray movement system controlled by a stepper driver (such as RD-323M10), this optical sensor can provide an action completion signal for synchronizing logic judgment with the next process trigger.

Typical functions:

Origin reset detection

Action completion flag

Abnormal interruption detection (travel exceeding limit)