Gasonics A89-013-01 Interface Control Panel

Brand:Gasonics
Model:A89-013-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A89-013-01 Interface Control Panel

Product manual:

1、 Product Overview
Gasonics A89-013-01 is an interface control panel used in Gasonics plasma equipment (such as Aura, PEP series),
Used for integrating device operation, status display, signal interaction, and local control functions.
This panel generally integrates physical buttons, indicator lights, communication interfaces, and display modules,
As a human-machine interaction interface between devices and users or maintenance engineers, it plays an important role in coordinating system functions and executing operational commands.

2、 Application Fields
1. Plasma treatment system (Plasma Asher/Cleaner)
Local control of key subsystems such as RF power supply, vacuum chamber, lifting platform, gas flow rate, etc;

Display device operating status, alarm prompts, process flow information, etc.

2. Load lock and handling platform
Provide manual control and interlock release buttons for easy maintenance and debugging;

Connect to the main control board to achieve IO status feedback and command issuance.

3. Security interlock and system testing interface
Includes emergency stop (EMO), door lock control, start/reset buttons, etc;

Suitable for manual control operations during equipment debugging, testing, and troubleshooting phases.