Gasonics A89-030-01 Loading Lock Interface Board

Product manual:

1、 Product Overview
Gasonics A89-030-01 is a key submodule in Gasonics plasma equipment (such as Aura or PEP series) - the Loadlock Interface Board,
Specially designed for controlling and coordinating the operation of the Loadlock chamber of equipment.
This interface board is mainly responsible for receiving instructions from the main control system,
And control the pump, inflation, solenoid valve, door lock mechanism, and related sensor feedback inside the Loadlock cavity to achieve automatic wafer loading/unloading process.

2、 Application Fields
1. Loadlock subsystem of semiconductor equipment
Control the vacuum pumping and back pressure inflation of the Loadlock chamber;

Manage the wafer handover logic between the robotic arm and the lifting platform.

2. Gasonics Plasma Asher/Cleaner System
Used to complete wafer loading and unloading before and after plasma treatment;

The safety check and gate control logic before RF startup are controlled by the linkage main system.

3. Equipment safety interlock control
Control the interlocking mechanism for opening/closing the chamber door;

Monitor signals such as pressure sensors, door status, and chamber vacuum to achieve automatic judgment.

3、 Product advantages
✅ Dedicated interface design: Fully compatible with Gasonics' original Loadlock system, supporting multiple signal types (such as digital IO, relay output, analog signal)
✅ Real time response: Ensure precise timing of each wafer transfer step and support high-speed cavity conversion requirements

Product details picture:

A89-030-01

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