Gasonics A90-031-03 Fault Detection Module

Brand:Gasonics
Model:A90-031-03
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A90-031-03 Fault Detection Module

Product manual:

1、 Product Overview
Gasonics A90-031-03 is a fault detection module designed specifically for Gasonics plasma equipment,
Used for real-time monitoring of the operating status of various subsystems of the equipment, timely detection and reporting of fault signals.
This module collects sensor data and control signals, analyzes abnormal situations, and triggers alarms,
Ensure the safe and stable operation of equipment, reduce unexpected downtime, and improve production efficiency.

2、 Application Fields
1. Plasma stripping and cleaning equipment
Monitor the working status of key components such as RF power supply, solenoid valve, gas flow, vacuum pump, etc;

Realize automatic fault recognition and alarm, and support maintenance personnel to quickly locate problems.

2. Automated wafer handling system
Detect anomalies in robot arms, motor drives, and lifting platforms and other actuators;

Ensure the safety of the handling process and prevent wafer damage.

3. Overall safety management of equipment
Interlocking logic of the linkage system, executing emergency shutdown or fault protection;

Record fault logs for subsequent analysis and maintenance.

3、 Product advantages
✅ Real time monitoring and rapid response: Capture abnormal signals in real time to shorten fault response time;

✅ Multi channel input support: compatible with multiple sensors and signal types, flexible adaptation to device requirements;

High reliability design: Industrial grade components ensure long-term stable operation;

✅ Easy to integrate and maintain: standardized interface design, convenient for integration with the main control system and troubleshooting;

✅ Improving equipment safety and production efficiency: effectively reducing downtime due to malfunctions and increasing equipment utilization.