Gasonics A90-040-01 Heater Module

Brand:Gasonics
Model: A90-040-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

Gasonics A90-040-01 Heater Module

Product manual:

product name
Gasonics A90-040-01 Heater Module

Product application areas
Heating control of semiconductor plasma equipment
Used for controlling heating elements in Gasonics Aura series plasma ashing or etching equipment, adjusting the temperature of heating tables, sample racks, and other components.

Temperature stability and process optimization
By precisely controlling the power of the heater, the constant process temperature is achieved, ensuring the stability and yield of the semiconductor manufacturing process.

Process protection and over temperature protection
Integrated over temperature protection function to prevent the heater from overheating and damaging equipment or workpieces, enhancing equipment safety.

Composition of Automated Temperature Control System
Cooperate with temperature sensors and controllers to achieve closed-loop heating control, automatically adjust heating power to meet process requirements.

Equipment maintenance and spare parts replacement
As an important module in equipment maintenance, it is used to replace damaged heating control units and restore the normal heating function of the equipment.

Laboratory and R&D equipment application
Used in laboratory environments or R&D testing equipment to simulate or control heating processes, supporting process development and testing.