Gasonics A90-2565 Controller Module

Product manual:

Product Name: Gasonics A90-2565 Controller Module
Component type: System Controller Module
Main function: Used in Gasonics plasma processing equipment as one of the core control units, responsible for managing process parameters, coordinating subsystem operation, executing logic control, and status monitoring tasks.

1、 Core of Process Control
The A90-2565 module is one of the process control centers of the equipment, which receives instructions from the upper system and coordinates subsystems such as the plasma generator, vacuum system, gas module, and temperature control unit.

Typical tasks include:

Control RF power on/off and power setting

Manage gas flow, valve status, and MFC commands

Execute lifting platform or transmit mechanical action instructions

Track and record process steps and stage timing

2、 Signal acquisition and response
This control module has multi-channel input and output capabilities, which can collect real-time device operating status and drive various execution components.

Supported signal types:

Digital/analog inputs (sensor signals, temperature, voltage, etc.)

Control output (power control, relay drive, signal lights, etc.)

Communicate with the upper computer (usually a serial port or customized bus)

3、 Equipment safety and interlock protection
A90-2565 also undertakes the judgment of critical safety interlock logic, ensuring that the equipment operates in a safe state and quickly cuts off relevant control circuits in case of abnormalities.

Example interlock application:

Do not turn on plasma when vacuum is insufficient

Failure to lock the chamber door prohibits starting the process

Cut off the RF power output when the temperature exceeds the limit

4、 Fault diagnosis and maintenance interface

Maintenance suggestion:

Check if the power input is stable

Confirm that all I/O interfaces are securely connected without oxidation

If replacing the module, please check the configuration parameters and software version synchronously

Product details picture:

A90-2565

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