Gasonics A93-021-04/C Magnetron Waveguides
Brand:Gasonics
Model:A93-021-04/C
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
Gasonics A93-021-04/C Magnetron Waveguides
Product manual:
Product Overview:
Gasonics A93-021-04/C is a magnetron waveguide component used in semiconductor manufacturing equipment for magnetron microwave systems.
This component is responsible for effectively transmitting and regulating the microwave energy generated by the magnetron, supporting the stable operation of plasma treatment processes.
Technical parameters (typical):
Type: Magnetron waveguide
Applicable equipment: Gasonics Aura 2000LL plasma cleaning equipment
Function: Transmit and regulate microwave energy
Structural form: Industrial grade metal waveguide tube, combined with magnetron and microwave emission system
Compatibility: Compatible with Gasonics Aura series related devices
Application scenarios:
Microwave energy transfer during plasma excitation process
Plasma processes such as semiconductor wafer cleaning and debonding
Equipment maintenance and replacement to ensure stable and reliable microwave transmission system
Cooperate with magnetron system to achieve efficient energy conversion
Product advantages:
Efficient microwave transmission reduces energy loss
Highly compatible with original equipment, easy to maintain and replace
Industrial design, adapted to harsh semiconductor process environments
Improve the stability and repeatability of plasma processing technology
Product details picture:
A93-021-04/C
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