Gasonics A93-021-05/D Magnetron Waveguide Module

Brand:Gasonics
Model: A93-021-05/D
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A93-021-05/D Magnetron Waveguide Module

Product manual:

product overview
This magnetron waveguide module is used for efficient transmission of microwave energy and generates stable plasma in conjunction with a magnetron,
Widely used in microwave plasma processing systems.

application area

Semiconductor Manufacturing

Microwave energy transfer in plasma etching process

Chemical Vapor Deposition (CVD) Thin Film Growth Process

Material surface treatment

Surface modification, cleaning, and activation processes

Microwave assisted coating deposition

Research and industrial microwave plasma equipment

Various laboratory and industrial grade microwave plasma reactors

Used for developing and optimizing plasma processes

summarize
Gasonics A93-021-05/D magnetron waveguide module is a key component in microwave plasma systems in the semiconductor and material processing fields,
Ensure efficient transmission of microwave energy and process stability.