Details
Gasonics A94-062-01 Robot Kit
Product manual:
product name
Gasonics A94-062-01 Robot Kit
product overview
Gasonics A94-062-01 is a robot kit for semiconductor plasma processing equipment,
Includes Theta Arm, Theta Board, end effector, and connecting cables.
This set is mainly used for automatic handling and processing of wafers, supporting efficient and automated operation of equipment.
application area
Plasma cleaning and stripping equipment
Used in Gasonics plasma equipment to automatically complete wafer handling, improve process automation level and production efficiency.
Equipment maintenance and upgrade
As a key replacement component, it is used to replace aging or damaged robot units, ensuring the continuous and stable operation of the equipment.
Research and laboratory applications
Support plasma process research in experimental environments and provide precise wafer handling capabilities.
Product advantages
Stable movement of the robotic arm ensures precise handling
Strong component compatibility, compatible with various Gasonics devices
Compact structure, easy to install inside the equipment
Using high-quality components, high reliability, and easy maintenance
Product details picture:

A94-062-01
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