Details
Gasonics A95-005-01 Controller Board
Product manual:
Gasonics A95-005-01 Controller Board
Function and Function:
Core control function module used in Gasonics plasma equipment
Implement system signal logic processing, subsystem control command execution, and equipment status feedback management
Control and coordinate the coordinated operation of other modules such as valve drive, power interface, vacuum system, transmission system, etc
Support data exchange between human-machine interface (HMI) and main control processor
Application areas:
Main control system in semiconductor wafer stripping equipment (Aura, PEP, A-2000LL series)
Key parts control such as automatic wafer loading and unloading, vacuum chamber control, elevator mechanism, etc
Plasma cleaning or pretreatment system in display panel manufacturing equipment
Process Control Platform in MEMS and Microelectronics Packaging Production Line
characteristic:
Industrial grade circuit board design with excellent anti-interference performance, suitable for clean rooms and high-precision manufacturing environments
Support multiple peripherals and signal input/output interfaces
Can be used as a replacement or repair board for original equipment
Has a certain degree of compatibility with A89-005-01 and A95-003 series control boards
Product details picture:

A95-005-01
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