Gasonics A95-023-03 Valve Assembly

Brand:Gasonics
Model:A95-023-03
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A95-023-03 Valve Assembly

Product manual:

1、 Product Overview
Gasonics A95-023-03 is a valve assembly specifically designed for plasma processing equipment,
Used to control the gas flow and gas path switching inside the equipment. This valve assembly can accurately regulate the flow of gas into and out of the chamber,
Ensuring the stability and accuracy of the gas environment required for plasma processes is a critical component in gas supply systems.

2、 Application Fields
1. Plasma stripping and etching equipment
Control the flow rate and pressure of process gases (such as argon and fluorine gases) entering the reaction chamber;

Realize rapid switching and sealing of gas paths to ensure process stability.

2. Plasma cleaning and surface treatment equipment
Manage the circulation of various reaction gases and support the switching of multiple process parameters;

Ensure the accuracy and response speed of gas supply.

3. Gas management systems in semiconductor manufacturing
Realize gas distribution and control in complex gas path systems;

Suitable for cleanroom environments, reducing the risk of leaks and contamination.