Gasonics A95-104-03 Elevator Module

Brand:Gasonics
Model:A95-104-03
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A95-104-03 Elevator Module

Product manual:

1、 Product Overview
Gasonics A95-104-03 is one of the key executing components in Gasonics plasma processing equipment,
Belongs to the Lift Mechanism Module. Its main function is to drive the wafer platform (such as wafer tray)
Vertical lifting and lowering movements are carried out in the process chamber or load lock chamber to achieve precise wafer loading and unloading, position alignment, or coordinated operation with robot arms.
This module typically includes electric or pneumatic drive mechanisms, guide rails, limit switches, and position feedback systems.

2、 Application Fields
1. Plasma stripping/cleaning equipment (such as Gasonics Aura/PEP series)
Control the lifting and lowering of the wafer in the reaction chamber, in conjunction with the flow of gas and the rhythm of plasma processing;

Complete wafer loading and unloading in a vacuum environment.

2. Load lock chamber system
Realize vertical handling coordination between wafers from Loadlock to processing chambers;

Linkage with vacuum doors and robotic arms to enhance automation level.

3. Positioning/Alignment Mechanism of Process Processing Platform
Provide precise Z-axis adjustment to ensure stable spacing between the wafer and electrodes or nozzles;

Suitable for multiple process steps such as surface treatment, etching, ashing, etc.