Gasonics A95-122-01 Load Lock Door Component

Brand:Gasonics
Model:A95-122-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A95-122-01 Load Lock Door Component

Product manual:

1、 Product Overview
Gasonics A95-122-01 is a door actuator component specifically designed for the load lock system of Gasonics plasma equipment (such as Aura, PEP series),
Responsible for achieving physical sealing and opening of vacuum chambers during wafer loading and unloading processes.
This door component integrates mechanical drive structure, sealing system, inductive sensors, and interlocking interfaces,
Used to ensure the safe operation of the load lock chamber in a vacuum environment, it is a key vacuum isolation unit in the entire system.

2、 Application Fields
1. Load lock system in semiconductor equipment
Implement sealed isolation from the main processing chamber;

Control the opening and closing actions before and after stabilizing the chamber pressure;

Linkage control of wafer transfer robotic arm and lifting system.

2. Plasma cleaning/debonding equipment (such as Gasonics Aura 3010, PEP 3510, etc.)
Used to ensure high vacuum sealing integrity during wafer entry and exit;

Support automatic door lock mechanism control and status perception feedback.

3、 Product advantages
✅ High reliability mechanical design: high repeated switch life, suitable for high-frequency wafer handling;
✅ Vacuum grade sealing performance: using corrosion-resistant and aging resistant sealing rings, suitable for vacuum and gas processes;
Strong linkage with the system: equipped with door status sensors that can be connected to PLC systems or main control boards to perform interlocking control;
✅ Easy installation and maintenance: Standardized module design for quick replacement or repair;
✅ High adaptability: can be applied to various Gasonics models, with good compatibility.