Gasonics A97-127-01 Controller Module

Brand:Gasonics
Model:A97-127-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics A97-127-01 Controller Module

Product manual:

The Gasonics A97-127-01 controller module is a specialized controller unit used in Gasonics plasma stripping systems,
Used to control the status and operational logic of specific subsystems such as gas channels, chamber vacuum, RF sources, vehicle transmission, or safety interlocks.
It usually serves as an intermediate module, connecting the front-end panel, main control board (such as A90 series), and execution components.

1、 Basic Information
Project Content
Part number A97-127-01
Name Controller Module
Manufacturer Gasonics/Applied Materials
The equipment is suitable for plasma stripping systems such as Gasonics PEP, Aura, L3510, AE series, etc
Category positioning I/O control expansion module/subsystem driver controller

2、 Core functions and roles
Functional category description
Signal processing receives control instructions from the main control system, amplifies, isolates, and distributes output signals
Execute peripheral sub devices such as drive control solenoid valves, relays, fans, pumps, or lights
Status feedback returns the working status of the subsystem to the main control system (such as air pressure OK, door closed, vacuum stable)
Interlocking management realizes process control interlocking, for example: RF is disabled if no vacuum is drawn
Module communication may be communicated with the main controller or other boards through dedicated parallel/serial ports