Details
Gasonics ABX-88919-41 Control Board
Product manual:
Product Name: Gasonics ABX-88919-41 Control Board
Component type: Main Control Board/Logic Controller
Main function: Responsible for the overall control logic of Gasonics plasma equipment, including process parameter management, signal processing, equipment status monitoring, and issuing execution instructions
1、 Equipment core control unit
This control board serves as the "brain" of the device, integrating signals from the operation panel, sensors, and actuators to achieve process automation.
Typical functions:
Process parameter setting and real-time adjustment
Control sub modules such as RF power supply, gas flow rate, vacuum system, etc
Monitor the safety interlock status and fault alarms
Communicate with the upper computer or Manufacturing Execution System (MES)
2、 Signal interface and data processing
The ABX-88919-41 control board integrates multiple digital and analog input/output interfaces, responsible for signal conversion and logic operations.
Interface type:
Digital Input/Output (DI/DO)
Analog Input/Output (AI/AO)
Communication interfaces (such as RS-232/RS-485, CAN, etc., depending on the specific device)
Relay driven output
3、 Automated execution of process flow
The control board coordinates the actions of various subsystems to ensure that the plasma process operates accurately according to the predetermined program.
Control object:
RF power module (such as AWD-D-1-0-023-010)
Gas flow controller (MFC)
Vacuum pump and valve control
Mechanical moving parts (lifting plate, load lock door)
Product details picture:

ABX-88919-41-1
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