Gasonics AWD-D-1-0-021-004 Control Module

Product manual:

The Gasonics AWD-D-1-0-021-004 control module is a key electronic control unit used in Gasonics plasma stripping equipment,
Mainly responsible for precise control of a functional subsystem within the system, such as gas flow, power management, vacuum control, or temperature control.
This module plays a core role in signal processing and execution control in plasma cleaning or stripping systems.

1、 Product Overview
The Gasonics AWD-D-1-0-021-004 control module is an integrated industrial control board or control unit,
It may be embedded within the device's main control system to control a specific functional block.
This numbering format (AWD-D-1-0-021-004) complies with Gasonics' internal component coding specifications,
Indicates that it belongs to submodule 021 in the AWD (which may represent a certain functional domain or control architecture) series of modules.

2、 Technical functions (possible control functions)
As this module is a dedicated control unit, common control functions include:

Plasma power control

Manage RF power switches, power regulation, protection interlocks, etc

Gas flow control

Control the command output of MFC (Mass Flow Controller) to accurately adjust the mixing ratio of reaction gases

Vacuum pump system control

Control the start/stop of vacuum pump, chamber pressure regulating valve, etc

Temperature/Heating Management

Set temperature control and over temperature protection for heating areas such as chambers and slide tables

Signal Processing and Communication

Receive sensor feedback signals and upload status information to the main control system

3、 Application Fields
The Gasonics AWD-D-1-0-021-004 control module is suitable for the following equipment systems and scenarios:

Gasonics Aura, L3510, PEP series plasma stripping systems

Photoresist removal steps in semiconductor wafer manufacturing process

Subsystem functional control of multi chamber equipment (such as heating chamber, cooling table)

Functional testing and debugging interface module during equipment maintenance and calibration

Product details picture:

AWD-D-1-0-021-004

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