Gasonics AWD-D-3-6-002 Magnetron waveguide
Brand:Gasonics
Model:AWD-D-3-6-002
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!
Details
Gasonics AWD-D-3-6-002 Magnetron waveguide
Product manual:
Product Name:
Gasonics AWD-D-3-6-002 Magnetron Waveguide Component
Product Overview:
This magnetron waveguide component is mainly used to efficiently transmit the microwave energy output by a microwave source (usually a magnetron) to the plasma processing chamber.
It is a key component in the Gasonics Aura series plasma cleaning equipment, ensuring the stability and directionality of microwave power transmission.
Application areas:
Semiconductor Manufacturing
Used for plasma processes such as wafer cleaning, debonding, etching, etc
Compatible with Aura 3000/3010 series plasma cleaning equipment
Microwave plasma excitation system
The waveguide structure ensures accurate transmission of microwave energy, improves plasma density and uniformity
Equipment maintenance and upgrade
As a key replacement module to ensure equipment performance during long-term operation or aging of magnetic waveguides
Process consistency control
By stabilizing the microwave transmission path, ensure the repeatability of the process results
Product advantages:
Microwave transmission has high efficiency and low loss
Good compatibility with original equipment, easy to replace
Sturdy structure, suitable for cleanroom environments
Improve the overall operational stability and process accuracy of the equipment
Product details picture:
AWD-D-3-6-002
More related products:
DS200PCCAG5ACB DC Digital Input Module
DAPC100Statorpressurecontrolpanel
6ES7312-5AC00-0AB0CentralProcessingUnit
More product recommendations:
ASEA 2668 184-447 Communication Module
