Details
Gasonics C12101 RMS-0069 Transformer
Product manual:
1、 Product Overview
Gasonics C12101 (also known as RMS-0069) is a power transformer module used in Gasonics plasma processing equipment,
The main function is to convert the input power supply voltage into multiple stable operating voltages required internally by the device,
Usually used to drive key units such as control systems, RF modules, vacuum components, sensors, etc.
This transformer is designed to meet industrial grade isolation and withstand voltage requirements, and is suitable for long-term operating environments.
2、 Application Fields
1. Plasma cleaning and stripping equipment (such as Gasonics Aura/PEP series)
Provide voltage conversion for the main control system, power drive module, air circuit control board, etc;
Provide stable AC or DC output to support the operation of core functional units.
2. RF power supply system
Provide isolated power supply to the RF generator to ensure stable plasma excitation;
Reduce the impact of radio frequency interference on other systems.
3. Load lock and robot control system
Supply power to actuating components such as solenoid valves and motor control boards;
Implement automated control and interlocking operation of the wafer loading process.
3、 Product advantages
✅ High stability voltage output: suitable for semiconductor process equipment with extremely high requirements for power quality;
✅ Industrial grade isolation design: providing complete electrical isolation of input/output to enhance system safety;
Product details picture:

C12101 RMS-0069
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