Gasonics L-3510 486 Control Motherboard

Brand:Gasonics
Model: L-3510 486
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics L-3510 486 Control Motherboard

Product manual:

product name
Gasonics L-3510 486 Control Motherboard

Product application areas
Main control system of semiconductor plasma ashing equipment
This motherboard is the core control unit of Gasonics L-3510 plasma ashing machine,
Responsible for equipment startup, operation, monitoring, and coordinated control of various subsystems.

Internal logic and process control of equipment
By using Intel 486 architecture processors to process operational flow logic,
Including reaction chamber control, temperature monitoring, gas flow control, RF power management, etc.

Graphic User Interface and Display Driver Support
Used in conjunction with the display driver board and receiver board to achieve control panel display functionality,
Provide human-machine interaction interface and fault prompt information for operators.

Wafer handling and robotic arm control system
Cooperate with pneumatic module and motor drive module,
Control the loading, handling, and unloading of wafers in the processing chamber to ensure the continuity of the process flow.

On site equipment maintenance and technical upgrade replacement
Used to replace the aging or malfunctioning main control board of the original machine, to achieve maintenance, recovery or performance improvement of old equipment,
Keep the system running normally.

Teaching and Technology Research Platform
Some research institutions or teaching units use retired Gasonics equipment for equipment operation principle teaching and system control research,
This motherboard has research and demonstration value as a typical industrial control device.