Gasonics NL-10256-16 waveguide sensor

Brand:Gasonics
Model:NL-10256-16
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics NL-10256-16 waveguide sensor

Product manual:

1、 Product Overview
Gasonics NL-10256-16 is a waveguide sensor specifically designed for plasma processing equipment,
Its main function is to transmit and detect microwave signals, and support the stable operation of plasma generators in the equipment.
This sensor is designed for the transmission path of high-frequency microwave signals, ensuring efficient signal transmission and waveform integrity, which is helpful for the generation and control of plasma.

2、 Application Fields
1. Plasma stripping and etching equipment
As a key component in the microwave transmission link, it transfers microwave energy to the plasma chamber to maintain plasma stability;

Used for Gasonics plasma equipment such as Aura and PEP.

2. Plasma cleaning system
Ensure effective transmission of microwave source signals and optimize energy input for cleaning processes;

Real time monitoring of waveguide condition to assist in equipment diagnosis.

3. Semiconductor and thin film manufacturing equipment
Ensure precise transmission of microwave frequency and power in processes such as microwave-assisted thin film deposition and surface activation;

Support high-frequency signal transmission to reduce energy loss.