Details
Gasonics PC545FS-W power module
Product manual:
The Gasonics PC545FS-W power module is a low-voltage DC power supply module designed specifically for Gasonics plasma equipment (such as the Aura 3000 or Aura 3010 series), mainly used to provide stable working power for the control system, pneumatic components, and display units in the entire machine.
Product Function and Function:
Provide multiple stable DC voltage outputs (such as 5V, 12V, or 24V) required by the device to supply modules such as the main control board, I/O board, and display.
Integrated overload protection and power status feedback function to ensure electrical safety of equipment.
It is one of the key power cores for device startup, operation, control, and pneumatic action.
Application areas:
Photoresist removal (plasma stripping) equipment in semiconductor manufacturing
Gasonics Aura series plasma cleaning equipment
Gas chamber control system (Loadlock, Process Chamber)
Supporting power supply for control board groups (such as A90-003, A90-005 series)
characteristic:
High reliability, long-life design, suitable for cleanroom equipment
Accurate matching with Gasonics original control logic board
Usually integrated into the electrical control cabinet and used in conjunction with AWD or AWM series assemblies
Product details picture:

PC545FS-W
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