Gasonics PH268M-E068 wafer lifting motor

Brand:Gasonics
Model: PH268M-E068
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics PH268M-E068 wafer lifting motor

Product manual:

product name
Gasonics PH268M-E068 wafer lifting motor

Product application areas
Semiconductor manufacturing equipment wafer lifting control
Used in Gasonics plasma processing equipment to drive the vertical lifting and lowering of wafers in load lock chambers or process chambers, achieving precise positioning and transfer of wafers.

Key execution components of automated handling system
As the core power unit in the automatic loading and unloading mechanical device, it cooperates with sensors to achieve safe lifting and position feedback of wafers.

Application of high-precision motion control
Suitable for wafer processing processes that require micrometer level control accuracy, ensuring smooth lifting and reducing mechanical vibration and displacement errors.

Cleanroom compatible design
Meet the strict cleanliness requirements of semiconductor manufacturing, suitable for use in clean room environments, and reduce particle pollution.

Equipment maintenance and replacement parts
Used to replace damaged or aged wafer lifting motors, restore normal mechanical operation of equipment, and ensure production continuity.

Research and experimental equipment application
During the equipment development and testing phase, as the power source for the lifting system, it supports process validation and optimization.