Gasonics PT-9012-286 Robot Controller Board

Brand:Gasonics
Model:PT-9012-286
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics PT-9012-286 Robot Controller Board

Product manual:

1、 Basic Information
Part number: PT-9012-286

Name: Robot Controller Board

Manufacturer: Gasonics/Novellus (later merged into Applied Materials)

Purpose: Used to control the action execution and feedback processing of wafer transfer robots

2、 Function Description
This control board is the main driving and control unit of the transfer robot in Gasonics plasma stripping equipment,
Used to achieve the following functions during the automatic wafer loading and unloading process:

Function Description
Motion control controls the precise movement of the X (horizontal), Z (lifting), and θ (rotation) axes of the robotic arm
Position feedback receives position signals from encoders or sensors
Exchange status signals such as Ready, Busy, Error, etc. between the state interlock and the main control system
Presence sensor or vacuum sensor data on the wafer inspection processing arm
Command execution receives action instructions from the main control program (such as pick, place, home)

3、 Applicable equipment
This control board is mainly used for wafer transfer robot control in the following systems:

Gasonics A-2000 / A-2000LL

Gasonics PEP 3510/3600 series

Some Gasonics OEM plasma processing equipment is also compatible for use