Gasonics RD-323M10 Stepper Driver

Brand:Gasonics
Model: RD-323M10
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics RD-323M10 Stepper Driver

Product manual:

Product Name: Gasonics RD-323M10 Stepper Driver
Component type: Stepper Motor Driver Module
Main purpose: To control the precise movement of stepper motors and achieve smooth movement or lifting of wafers inside the equipment

1、 Motion Control System in Plasma Cleaning Equipment
This driver is used in Gasonics plasma processing equipment to drive stepper motors to complete wafer handling or actuator positioning movements.

Typical applications:

Up and down movement control of load lock elevator

Horizontal movement control of wafer handler transfer platform

Linear opening/closing control of components such as valves and shutters

2、 Stepper motor control of wafer handling system
This driver module is integrated into the wafer handling system to achieve precise step control, ensuring smooth transfer of wafers from FOUP or Cassette to the processing chamber.

Application object:

Wafer handling robot arm

Elevator Lift

XY horizontal platform track drive unit

3、 Automation devices with high control accuracy requirements
The stepper driver ensures synchronized actions and precise positioning during the processing, making it suitable for processes such as the Gasonics Aura series that require high precision in handling.

Control characteristics:

Microstepping driver

Current limitation and overheating protection

Linkage with the main control system through TTL or PLC interface