Gasonics SS-BNV51-VCR4C Valve Isolation

Brand:Gasonics
Model: SS-BNV51-VCR4C
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics SS-BNV51-VCR4C Valve Isolation

Product manual:

Product Name: Gasonics SS-BNV51-VCR4C Valve Isolation Component
Component type: Stainless Steel Gas Isolation Valve with high vacuum grade
Main function: Used for isolating, switching, and protecting high-purity gas paths in Gasonics plasma equipment, preventing cross contamination, and ensuring the airtightness and integrity of the process chamber.

1、 Gas path isolation and control
This valve isolation valve is used to control the flow and cutoff of high-purity gases (such as O ₂, N ₂, Ar, etc.) between the process chamber and the gas system, and is a critical safety component in gas delivery systems.

Typical application scenarios:

Exhaust/blow off the gas path before the process

Realize high-precision gas switching in the process

Prevent residual gas backflow and pollution after the process

2、 Structure and Interface
Valve body material: stainless steel (suitable for high-purity and highly corrosive gas environments)

Connection method: VCR 4C connector (Swagelok VCR interface, suitable for vacuum sealing)

Control mode: usually pneumatic drive (can be connected to the controller module)

Sealing type: metal to metal seal or PTFE gasket, customized according to the process

3、 Used in conjunction with pneumatic modules
This isolation valve is usually installed at the front end of the Gas Distribution Module (GDM) or MFC, and works in conjunction with the following modules:

Mass Flow Controller (MFC)

Quick switching valve group

Safety components such as pressure relief valves and check valves

Process chamber air inlet