Gasonics UNO-1497 Temperature Controller

Product manual:

product name
Gasonics UNO-1497 Temperature Controller
(Temperature Controller Module)

1、 Product Overview
Gasonics UNO-1497 is a specialized temperature controller module used in the Gasonics series plasma ashing and cleaning equipment to accurately regulate and monitor the temperature of process chambers, heaters, hot plates, and other parts. This controller is capable of real-time acquisition of thermocouple signals and outputting control signals to heating elements, achieving closed-loop temperature control and ensuring process consistency and thermal stability.

2、 Technical parameters
Module Type: Temperature Controller/Process Temperature Control Module

Temperature input signal:

Supports standard thermocouple inputs such as K-type and J-type

Control channel:

Single channel or multi-channel temperature control (depending on configuration)

Control output:

Simulate voltage/current signal to control heater

Or relay/SSR signal output controls heating power supply

Control method:

PID closed-loop control (automatic or manual mode)

Output power control accuracy:

Can set upper and lower limit alarm values and proportional/integral/derivative parameters

Power supply requirements:

+24 VDC or ± 15 VDC (depending on equipment configuration)

Communication interface:

Communicate with the main control module through the backplane or serial interface

Status display:

The front panel is equipped with a temperature display window and an alarm status indicator light

Product details picture:

UNO-1497

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