Details
KLA Tencor 0061386-004 Backboard
Product manual:
KLA Tencor 0061386-004 Backplane is the core connecting component in semiconductor testing equipment, and its main application areas are concentrated in the following aspects:
1. Wafer inspection and measurement system
This backplane is widely used in KLA Tencor wafer inspection equipment as an interconnection platform between multiple control modules, processing boards, and execution units. It is commonly used in the following equipment types:
Defect detection equipment (such as KLA 2132/2350/2810 series)
Optical metrology system
Electron beam detection equipment
2. Internal signal and power distribution within the system
The backplane is responsible for the following key functions:
Power distribution of various functional boards (DC power supply)
High speed signal bus connection (such as data communication, clock signal)
Bus transmission of control commands and status information
Synchronization and coordination between boards
3. Basic platform for modular system architecture
In modular system design, the backplane serves as the backbone platform of the system and can plug in multiple submodules, such as:
Image processing board
Controller board (such as 073-650043-00)
Interface/communication board (such as RS-232, GPIB, Ethernet, etc.)
Scan control and focusing circuit board
This enables the device to have good maintainability and scalability.
4. High reliability equipment operation guarantee
This backplane adopts an industrial grade high reliability design, suitable for 24/7 continuous operation in wafer fab environments, which helps to:
Reduce system failure rate
Improve the stability of communication between modules
Ensure long-term consistency of system operation
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