KLA Tencor 0085225-000 Circuit Board

Product manual:

KLA Tencor 0085225-000 is an electronic diagnostic control circuit board for fan filter units (FFUs),
Usually used in KLA Tencor wafer inspection and metrology equipment, it is an important component to ensure stable operation of equipment in clean environments.

1、 Product Features
Electronic diagnosis: used to monitor the operating status of FFU, including parameters such as fan speed, current, voltage, etc.

Fault detection: Provides self diagnostic function to promptly detect and report abnormal FFU situations.

Environmental control: By adjusting the operation status of the fan, it helps the equipment maintain a clean environment that meets standards.

2、 Typical application areas
Semiconductor manufacturing: used in wafer surface defect detection and metrology systems,
Ensure that the testing process is not affected by air particulate pollution.

Cleanroom equipment: widely used in systems that require stable air circulation and particle control,
Ensure a high-precision process environment.

Wafer process control equipment: used to control and monitor the air quality inside the equipment,
Improve system stability and equipment lifespan.

3、 Applicable equipment
FFU control module commonly used in high-end wafer inspection systems such as KLA Tencor Surfscan series and SP series.

summarize
The KLA Tencor 0085225-000 circuit board serves as the electronic control and diagnostic core of the FFU system,
Widely serving semiconductor manufacturing and testing equipment with high cleanliness requirements, it is crucial to ensure testing accuracy and system reliability.
It is recommended that the replacement and maintenance of such circuit boards be carried out by professional engineering and technical personnel.

Product details picture:

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