Details
KLA Tencor 0116878-001 Single Board Computer
Product manual:
The KLA Tencor 0116878-001 single board computer is one of the core control components used in KLA Tencor semiconductor testing equipment
Mainly responsible for processing control signals, data communication, and equipment coordination functions.
Main application areas:
Semiconductor wafer inspection system
Applied to wafer defect detection equipment such as Surfscan series,
Used for tasks such as image acquisition, motion control, and data processing.
Automatic Optical Inspection Equipment (AOI)
As the control core in the AOI system, responsible for image analysis
Detection algorithm processing, device communication, etc.
Motion Control and Alignment System
Control stepper motor, servo platform, optical positioning system,
Ensure precise movement of the detection probe or wafer platform.
Research instruments and industrial testing platforms
Integrated into some high-end experimental equipment for material detection, thin film analysis, and surface structure scanning.
Functional features (inferred from similar KLA modules):
Integrated central processing unit for real-time control and processing of complex tasks
Provide multiple industrial standard I/O interfaces (such as serial port, parallel port, network interface)
Support data exchange and bus communication with other modules in the detection equipment
High stability, suitable for environments with continuous long-term operation
Can run in conjunction with the operating system and support customized software deployment
Summary:
0116878-001 single board computer is a key control unit in KLA Tencor wafer inspection equipment,
Mainly used for precision motion control, data processing, and equipment coordination, it has a wide range of applications in semiconductor manufacturing, testing, and research fields.
Product details picture:

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