KLA Tencor 0312143-000 power module

Product manual:

KLA Tencor 0312143-000 is a high-power power module commonly known as the X-Y Stage High Power Amp Board,
Widely used in KLA Tencor's high-end semiconductor wafer inspection and measurement equipment, especially for controlling precision X-Y motion platforms.

1、 Product Function Introduction
Main function: Provide high-power driving current for the X-Y motion platform,
Realize high-precision and fast movement of wafers on the inspection platform.

Application type: Power amplifier, usually providing amplified control signals for servo or stepper motor systems.

Hardware architecture: In the form of a board, it may be integrated into the power and motion control units of large detection systems.

2、 Typical application areas
1. Wafer defect detection system (such as Surfscan, SP series)
Control the precise movement of the scanning platform to achieve comprehensive optical inspection of the wafer from the center to the edge;

Ensure smooth and vibration free movement, and achieve precise identification of micro/nano level defects.

2. Precision X-Y mechanical platform control
Used for platform alignment in wafer surface or device layer pattern detection;

Provide high-speed response and high stability linear movement capability.

3. Optical alignment system
Drive the alignment platform to achieve precise position adjustment of image acquisition components;

The key is to ensure the stacking accuracy of multi-layer wafer patterns.

4. Automated wafer handling system
In situations where high reliability and precise path control are required, drive the platform or robotic arm to move the wafer;

Specially suitable for high-speed handling systems of 300mm wafers.

3、 Technical characteristics
Project Description
Control type X-Y dual axis high-power drive
Output capability suitable for servo motor drive, with high response speed
Feedback support supports closed-loop control and is compatible with high-resolution encoder feedback
System architecture board card design, easy to modularize integration and maintenance
Equipment compatibility for use with KLA Tencor wafer inspection equipment

Product details picture:

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