KLA Tencor 0390749-000 Safety Monitoring Board
Brand:KLA-Tencor
Model:0390749-000
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
KLA Tencor 0390749-000 Safety Monitoring Board
Product manual:
The KLA Tencor 0390749-000 Safety Monitor Board is a critical safety assurance module in the KLA Tencor wafer inspection equipment,
Detailed functional description
Nitrogen system status monitoring
This safety monitoring board can continuously detect key parameters such as pressure and flow rate in the nitrogen supply system.
Real time judgment of whether gas supply is within normal range through sensor feedback data.
Ensure the safe and stable supply of nitrogen gas for dust prevention, explosion prevention, and environmental control throughout the entire testing equipment.
Abnormal detection and alarm mechanism
When the system detects insufficient air pressure, abnormal flow rate, or gas leakage, the onboard control logic will immediately trigger an alarm signal.
The alarm information will be sent to the main control system and alerted to the operator through the device's user interface.
By promptly alerting, potential operational risks of the equipment can be reduced and interruptions in the detection process can be avoided.
System integration and communication
The safety monitoring board is designed to be tightly integrated with the KLA Tencor main control system.
Support digital or analog signal communication to ensure real-time transmission of safety status information.
It can achieve remote monitoring and fault diagnosis, facilitating equipment maintenance and management.
Industrial grade design standards
Compact structure, easy to install in designated locations inside the equipment.
Support long-term stable operation and reduce maintenance frequency.
Application scenarios
Semiconductor wafer testing equipment
Mainly used in the nitrogen protection system of KLA Tencor's various wafer inspection systems to ensure a dust-free environment and explosion-proof requirements.
Cleanroom automation equipment
Implement safe gas management in production equipment that requires nitrogen protection.
Industrial Safety Monitoring System
Other related industrial automation equipment used for monitoring gas supply safety.
Product details picture:
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