Details
KLA Tencor 073-404145-00 Circuit Board
Product manual:
The KLA Tencor 073-404145-00 circuit board is a critical control component specifically designed for semiconductor wafer inspection equipment,
Widely used in multiple detection platforms of KLA, especially in electron beam detection and optical detection equipment.
The following are its main product application areas:
Application areas of KLA Tencor 073-404145-00 circuit board
1. Wafer defect detection system
Used in high-precision electron beam (e-beam) or optical wafer inspection systems,
Process signals from detectors or scanning mechanisms.
Support the recognition and analysis of small defects, particle contamination, pattern anomalies, etc. on the surface of wafers.
Typical application models include the KLA eS31 series electron beam detection equipment.
2. Multi layer pattern alignment detection
In KLA 5100/5200 series pattern alignment detection equipment,
This circuit board plays a role in image data acquisition and synchronization control.
Multi layer pattern stacking detection is crucial for advanced packaging (such as 2.5D, 3D IC) manufacturing processes.
3. Semiconductor process control equipment
Used for process quality monitoring systems to ensure the stability and consistency of wafers at different stages of the manufacturing process.
The corresponding detection results are used in real-time process feedback and yield improvement strategies.
4. Internal signal distribution and processing of equipment
Play the role of a hub for system communication, control command transmission, and status feedback,
Connect the main controller with execution units, sensors, actuators, etc.
Ensure stable operation and precise response of the equipment.
Applicable environment and characteristics
Environment: A semiconductor manufacturing plant with a cleanroom rating and a 24/7 continuous operating environment.
Features: High stability, modular, anti-interference design, supporting multi-channel high-frequency signal processing.
Product details picture:

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