Details
KLA Tencor 073-404555-00 Controller Board
Product manual:
The KLA Tencor 073-404555-00 controller board is an important electronic module designed specifically for semiconductor testing equipment, responsible for driving and controlling the internal stepper motors of the equipment.
This controller board ensures that the mechanical components of the equipment can be positioned and moved with extremely high precision,
Thus supporting efficient and accurate wafer defect detection.
Detailed Function Description
Stepper motor drive and control
Drive stepper motors with high-precision pulse signals to ensure mechanical components
Smooth movement and accurate positioning of scanning platforms, probe arms, etc., supporting movement control at the micrometer or even nanometer level.
Signal reception and processing
Receive command signals from the main control unit, process the signals in real-time,
Coordinate the synchronization of actions among multiple executing components to ensure the collaborative work of the entire system.
Protection and feedback mechanism
Simultaneously equipped with feedback signal interface for monitoring motor status and motion accuracy.
Modular design
Supports quick replacement and upgrade, facilitating device maintenance and system expansion.
application area
Wafer inspection equipment
Control the mechanical movement of the wafer inspection equipment to ensure accurate scanning of surface defects on the wafer by the detection head or sensor.
Automatic production line
Used for driving and controlling semiconductor manufacturing automation equipment to improve the automation and intelligence level of production lines.
Equipment maintenance and upgrading
As a key replacement component, ensure that old equipment maintains stable performance during upgrades or maintenance.
Technical parameters (some typical indicators)
Applicable motor type: stepper motor
Input voltage range: usually in accordance with KLA equipment standards (please refer to the equipment manual for details)
Control interface: compatible with KLA Tencor system communication protocol
Size and installation method: Modular card board design for easy integration and replacement
Product details picture:

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