Details
KLA Tencor 073-451126-00 Circuit Board
Product manual:
KLA Tencor 073-451126-00 Circuit Board - Product Application Fields
Wafer defect detection equipment
Used for image processing, signal analysis, or control logic modules in KLA Tencor wafer inspection systems (such as Surfscan, SP, P series), supporting functions such as particle detection and scratch recognition.
By collecting and transmitting high-speed signal data, detection efficiency and resolution can be improved.
Electron beam detection platform
Applied in e-beam (electron beam) detection equipment, participating in data processing and control, supporting the recognition and image analysis of sub micron level defects.
Advanced Process Control (APC) System
Control and optimize key process steps in wafer manufacturing to ensure consistent quality in etching, deposition, polishing, and other processes.
Image acquisition and processing module
As one of the core circuit boards for image acquisition channels or processing units in the system, it assists in achieving multi-channel image processing and high-speed communication tasks.
Motion control and positioning feedback support
May be used for precision platform control inside equipment, such as wafer handling systems, XY platforms, rotary motors, etc., to achieve stable alignment operations and feedback control.
Application of High Reliability Embedded Systems
As a component of embedded control systems, this board card often has industrial grade characteristics such as high temperature resistance and anti-interference, making it suitable for long-term operation in clean room environments.
Adapt to multiple detection platforms
Widely integrated into multiple models of KLA Tencor devices, such as:
Surfscan series (for particle and pollution detection)
SP series (for image-based defect detection)
ES series (electron beam system)
Data processing or control modules in other customized systems
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