KLA Tencor 073-614993-000 Driver Module

Brand:KLA-Tencor
Model:073-614993-000
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

KLA Tencor 073-614993-000 Driver Module

Product manual:

KLA Tencor 073-614993-000 Driver Module
It is one of the core execution units in KLA Tencor semiconductor detection or measurement equipment,
Mainly used to drive and control servo motors, stepper motors, or other linear/rotary actuators in motion systems.
It is a critical interface connecting the controller and the executing components, directly affecting the motion accuracy and response speed of the device.

1、 Basic Product Information
Product model: 073-614993-000

Type: Driver Module

Brand: KLA Tencor

Functional positioning: Execute control instructions, drive moving parts, achieve high-speed, precise positioning or scanning actions

2、 Main functions
Function Description
Motor driven control of stepper motors, servo motors, or linear motors to achieve precise displacement or rotation movements
Closed loop control supports receiving feedback from encoders or position sensors for PID adjustment
Pulse/analog signal input receives PWM, pulse direction signal or analog control signal from the controller
Overload and fault protection with overcurrent, overvoltage, and overheating protection to improve system reliability
High speed response is suitable for nanoscale motion control requirements and is commonly used for wafer positioning or optical platform driving

3、 Typical application areas
Wafer scanning platform driver
Controlling the X/Y/Z axis platform to achieve high-resolution scanning actions is an essential component in defect detection systems.

automatic alignment system
Realize precise alignment at the micrometer or even nanometer level.

Optical component driver in image acquisition system
Drive lens focusing, filter switching and other devices.

Probe or carrier control
Accurately control the movement of the carrier to achieve automatic detection or measurement.