KLA Tencor 073-650098-00 Controller Board

Product manual:

KLA Tencor 073-650098-00 Controller Board - Introduction to Application Fields
This controller board is typically a key electronic module in KLA Tencor semiconductor testing equipment, responsible for the core control and data processing of the equipment.
It plays an important role in wafer inspection, metrology, and automation control systems.

Main application areas:
Control of wafer defect detection equipment

Coordinate the operation of the optical scanning system, image acquisition module, and motion platform;

Responsible for collecting sensor data and performing real-time processing to ensure detection accuracy and speed.

Multi axis motion control

Realize precise positioning by driving servo motors or stepper motors;

Control the movement of X, Y, Z axes and rotation axes to meet the requirements of nanoscale positioning.

Signal processing and device communication

Implement data exchange with other subsystems such as image processing units, laser control modules, etc;

Support industrial standard communication protocols to ensure overall device collaboration.

Automated Manufacturing and System Integration

As the control core of semiconductor production line testing equipment, it supports automated process flow;

Ensure stable operation of equipment, improve production efficiency and yield.

Typical application devices:
KLA Tencor Surfscan series wafer surface defect detection system;

KLA Tencor P series and other high-end semiconductor testing and measuring equipment;

Related optical scanning and laser measurement platforms.

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