KLA Tencor 073-650203-00 Hardness Plate

Product manual:

KLA Tencor 073-650203-00 Hardness Plate - Product Application Fields

KLA Tencor 073-650203-00 hardness board is an electronic board used in semiconductor testing and metrology equipment.
According to the application background of KLA Tencor products, the typical application areas of this hardness plate are as follows:

Wafer surface inspection system
Used in wafer defect detection equipment, such as the Surfscan series, to detect particles, scratches, contaminants, etc. on the surface of wafers.

Metrology Systems
Applied in optical CD measurement, overlay alignment and other systems,

Ensure that the system has high measurement accuracy and data consistency.
Automated motion control system
Motors and servo systems used to drive or control wafer transfer platforms,
Improve response speed and control accuracy, enhance the mechanical "hardness" and stability of equipment operation.

Laser scanning and optical imaging system
May be used to adjust the electrical parameters of laser light sources or image acquisition modules,
Enhance the system's noise resistance and improve the stability and clarity of optical recognition.

System interference suppression and environmental stability module
In the working environment of the equipment, hardness plates may also be used to handle thermal drift
Power fluctuations or electrostatic interference ensure data accuracy during the detection process.

summarize
The main function is to enhance the stability, signal processing capability, and anti-interference performance of the system, and it is one of the key components for achieving high precision and reliability of the equipment.

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