KLA Tencor 073-652839-00 Controller Module

Product manual:

Introduction to KLA Tencor 073-652839-00 Controller Module
This module is the core control unit used by KLA Tencor for wafer surface inspection equipment,
Commonly referred to as RIF Board (Reflective Imaging Filter Board),
Mainly integrated into various Surfscan series detection instruments (such as Surfscan 2132, 2138, 2139, eS31, etc.).

major function

Reflective imaging filter control
The module controls the position and state of the reflective imaging filter to achieve optical filtering functions for different wavelengths,
In order to adjust imaging parameters according to different detection requirements and improve detection sensitivity and accuracy.

Multi module communication interface
This controller module has multiple communication interfaces and can achieve communication with other modules within the device

System stability and security assurance
When designing, attention should be paid to anti-interference ability and stability to ensure the reliability of equipment during long-term continuous operation,
Reduce the risk of downtime caused by electronic malfunctions.

Equipment maintenance and upgrade support
The modular design of this module structure facilitates quick replacement or upgrade by maintenance personnel,
Greatly reduce equipment maintenance time and complexity, and improve the overall efficiency of the production line.

application area
Semiconductor wafer defect detection
As an important component in wafer inspection equipment,

Optical imaging system control
Control imaging filters, optimize optical detection conditions, and adapt to different types of wafer materials and detection processes.

System integration of high-precision detection equipment
As a key control unit of the system, participate in the electronic information processing and coordinated management of the entire detection instrument.

FEATURES
Support high-speed image data processing, low latency, fast response

Multi channel input, supporting multiple sensor interfaces

Equipped with anti electromagnetic interference design, suitable for industrial environments

Compatible with multiple Surfscan device models, with good scalability

Modular design for quick on-site maintenance and replacement

Product details picture:

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