Details
KLA Tencor 500-22333-001 Single Board Computer
Product manual:
The KLA Tencor 500-22333-001 single board computer is a customized embedded processing module,
Mainly used as the central control unit in KLA Tencor wafer inspection equipment,
Used for system coordination, data processing, and device communication. The following is a detailed application area description of this module:
Product type:
Model identification: 500-22333-001
Alias: SBS V5C VME Bus Single Board Computer (V5C-KLA3FPB)
Product application areas:
1. Wafer defect detection system
Applied to wafer inspection equipment such as Surfscan, 2132, 2133 under KLA Tencor.
Manage the functions of image acquisition, data synchronization, analysis, and feedback during the defect detection process.
2. Quality control in semiconductor manufacturing
Mainly serving key process nodes in wafer manufacturing
(such as photolithography, etching, chemical mechanical polishing, etc.) for defect detection.
Help manufacturers quickly identify surface micro defects and improve yield.
3. System level control and collaborative scheduling
As the main processor control core, it operates in conjunction with image processors, motion controllers, IO interface boards, and other components.
Control the startup, operation, data transmission, and abnormal response of the entire detection system.
4. VME bus architecture support
Support system design based on VME bus,
It is a commonly used high reliability embedded control platform in industrial automation and semiconductor detection systems.
Provide multiple communication bus interfaces to meet high-performance synchronization and control requirements.
Typical usage environment:
Semiconductor wafer foundries (such as TSMC, GlobalFoundries, and UMC)
Integrated Device Manufacturers (IDMs) (such as Intel, Micron, Samsung)
Defect analysis equipment in testing laboratories or R&D lines