KLA Tencor 500-22560-000 Motor Controller

Product manual:

KLA Tencor 500-22560-000 Motor Controller - Product Application Fields
KLA Tencor 500-22560-000 is a specialized motor controller module used in precision equipment,
Its main task is to drive and control the precise movement of precision motors in the equipment.
It has the following typical applications in KLA Tencor's detection and measurement equipment:

1. Wafer Handling Systems
Control the loading and unloading process of wafers in the testing equipment.

Accurately drive the X/Y/Z axis motion platform or robotic arm to ensure smooth transfer of wafers between multiple workstations.

2. Stage Motion Control
Used to drive high-precision optical platforms, scanning platforms, or rotating platforms,
Realize nanoscale motion control to meet requirements such as CD measurement and overlay detection.

3. Optical focusing and lens adjustment mechanism
Control the micro servo motor or stepper motor in the automatic focusing system,
Maintain stable imaging performance of the imaging system at different heights.

4. Laser or light source adjustment system
Adjust the angle, position, or focal point of the laser or illumination source,
Ensure stable beam path and clear image.

5. Probe or probe position control (such as E-Beam or AFM equipment)
Control the displacement and response speed of the detector at the extremely micro scale,
Used for surface contour scanning, defect detection, etc.

Product characteristics (speculation)
Characteristic description
Control type: servo/stepper motor controller (may support closed-loop feedback)
The communication interface communicates with the main control system through CAN, RS-485, or PCIe
Precision control for displacement control at the nanometer or submicron level
Application compatibility seamlessly integrates with KLA detection equipment and measurement platforms
Anti interference design supports EMI suppression and system stability optimization

summarize
Project Description
Product model KLA Tencor 500-22560-000
Type: Precision Motor Controller
Application areas: wafer handling, platform control, autofocus, probe adjustment, laser path adjustment, etc

Product details picture:

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